Diamond and Other Hard Materials in Combination with the LSI-Process

Titelangaben

Huang, Xianliang ; Frieß, Martin ; Krenkel, Walter ; Kochendörfer, Richard:
Diamond and Other Hard Materials in Combination with the LSI-Process.
In: Proceedings : papers, keynotes and plenaries of Materials Week 2002, the European Congress on Advanced Materials, their Processes and Applications ; 30 Sept - 1 Oct 2002. - Frankfurt : Werkstoff-Informationsges. , 2002 . - CD-ROM
ISBN 3-88355-314-X